Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication

James Lee; Marc J. Madou; Kurt W. Koelling; Sylvia Daunert; Siyi Lai; Guan Koh; Yi Je Juang; Yumin Lu; Liyong Yu

doi:10.1023/A:1012469017354

Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication

James Lee, Marc J. Madou, Kurt W. Koelling, Sylvia Daunert, Siyi Lai, Guan Koh, Yi Je Juang, Yumin Lu, Liyong Yu

Institute of Biopharmaceutical Sciences

Research output: Contribution to journal › Article › peer-review

86 Scopus citations

Abstract

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

Original language	English
Article number	381088
Pages (from-to)	339-351
Number of pages	13
Journal	Biomedical Microdevices
Volume	3
Issue number	4
DOIs	https://doi.org/10.1023/A:1012469017354
State	Published - 2001

Keywords

CNC-machining
Deep reactive ion etching
Electroplating
Hot embossing
Liquid resin casting
Microfabrication
Photolithography
Thin wall injection molding

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10.1023/A:1012469017354

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@article{790e838da23a4c7dae3b4da9d48091f6,

title = "Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication",

abstract = "Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.",

keywords = "CNC-machining, Deep reactive ion etching, Electroplating, Hot embossing, Liquid resin casting, Microfabrication, Photolithography, Thin wall injection molding",

author = "James Lee and Madou, {Marc J.} and Koelling, {Kurt W.} and Sylvia Daunert and Siyi Lai and Guan Koh and Juang, {Yi Je} and Yumin Lu and Liyong Yu",

note = "Funding Information: The authors wish to thank Lynn Kim and Yihfar Chen at Burstein Technologies Inc. for their assistance on making DRIE mold. This work is supported by NASA, NSF (DMI-0084919), and the NSF Centers for Advanced Polymer and Composite Engineering (CAPCE) and Industrial Sensors and Measurements (CISM) at The Ohio State University.",

year = "2001",

doi = "10.1023/A:1012469017354",

language = "English",

volume = "3",

pages = "339--351",

journal = "Biomedical Microdevices",

issn = "1387-2176",

publisher = "Kluwer Academic Publishers",

number = "4",

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TY - JOUR

T1 - Design and fabrication of CD-like microfluidic platforms for diagnostics

T2 - Polymer-based microfabrication

AU - Lee, James

AU - Madou, Marc J.

AU - Koelling, Kurt W.

AU - Daunert, Sylvia

AU - Lai, Siyi

AU - Koh, Guan

AU - Juang, Yi Je

AU - Lu, Yumin

AU - Yu, Liyong

N1 - Funding Information: The authors wish to thank Lynn Kim and Yihfar Chen at Burstein Technologies Inc. for their assistance on making DRIE mold. This work is supported by NASA, NSF (DMI-0084919), and the NSF Centers for Advanced Polymer and Composite Engineering (CAPCE) and Industrial Sensors and Measurements (CISM) at The Ohio State University.

PY - 2001

Y1 - 2001

N2 - Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

AB - Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

KW - CNC-machining

KW - Deep reactive ion etching

KW - Electroplating

KW - Hot embossing

KW - Liquid resin casting

KW - Microfabrication

KW - Photolithography

KW - Thin wall injection molding

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U2 - 10.1023/A:1012469017354

DO - 10.1023/A:1012469017354

M3 - Article

AN - SCOPUS:0035193392

SN - 1387-2176

VL - 3

SP - 339

EP - 351

JO - Biomedical Microdevices

JF - Biomedical Microdevices

IS - 4

M1 - 381088

ER -

Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication

Abstract

Keywords

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