Design and characterization of a silicon piezoresistive three-axial force sensor for micro-flapping wing MAV applications

Keyphrases

• Force Sensor 100%
• Axial Force 100%
• Three-axial 100%
• Vehicle Application 100%
• Piezoresistive 100%
• Flapping-wing Micro Aerial Vehicles (FWMAVs) 100%
• Micro Flapping Wing 100%
• Piezoresistor 66%
• Micro Aerial Vehicle 66%
• High-resolution 33%
• Dry Etching 33%
• High Linearity 33%
• Micro-electro-mechanical Systems Technology 33%
• Micro-electro-mechanical Systems 33%
• Fabrication Methods 33%
• Silicon-on-insulator Wafer 33%
• Finite Element Analysis 33%
• Drag Force 33%
• Tangential Force 33%
• Inertial Force 33%
• Low Hysteresis 33%
• Flapping Frequency 33%
• Multi-axis 33%
• Beam Structure 33%
• Flapping Wing Mechanism 33%
• Crossbeam 33%
• Piezoresistive Force Sensor 33%
• Electromechanical Characterization 33%
• Axis Sensor 33%
• Lift Force 33%
• Flapping-wing System 33%
• Silicon Strain Gauge 33%
• Vehicle Aerodynamics 33%
• Micro-force Sensor 33%

Engineering

• Microelectromechanical System 100%
• Axial Force 100%
• Piezoresistor 100%
• High Resolution 50%
• Silicon on Insulator 50%
• System Technology 50%
• Dry Etching 50%
• Tangential Force 50%
• Strain Gage 50%
• Inertial Force 50%
• Drag Force 50%
• Beam Structure 50%
• Cross Beam 50%
• Normal Force 50%
• Micro System 50%
• Lift Force 50%
• Finite Element Analysis 50%
• Aerodynamics 50%