Deposition of polymer films by atmospheric pressure plasma

Chuan Li*, C. T. Yu, J. H. Hsieh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this study, we investigate the effects of radio frequency of power and gas flow rates on the chemical compositions of atmospheric He plasma. A customized plasma system was setup and equipped with a radio frequency power supply and an optical emission/absorption spectrometer to help characterizing the plasma. For the deposition of thin polymer films, lactic acid is chosen for its chemical stability, biocompatibility and biodegradability. The properties, compositions and microstructures of deposited films are also investigated to assure the success of deposition.

Original languageEnglish
Title of host publicationProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538614457
DOIs
StatePublished - 22 Jun 2018
Event7th International Symposium on Next-Generation Electronics, ISNE 2018 - Taipei, Taiwan
Duration: 7 May 20189 May 2018

Publication series

NameProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018

Conference

Conference7th International Symposium on Next-Generation Electronics, ISNE 2018
Country/TerritoryTaiwan
CityTaipei
Period7/05/189/05/18

Keywords

  • Atmospheric plasma
  • Optical emission/absorption spectra
  • Plasma chemistry
  • Polymer deposition

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