@inproceedings{eb83918caa7a472cad67bc5b28e223e1,
title = "Deposition of polymer films by atmospheric pressure plasma",
abstract = "In this study, we investigate the effects of radio frequency of power and gas flow rates on the chemical compositions of atmospheric He plasma. A customized plasma system was setup and equipped with a radio frequency power supply and an optical emission/absorption spectrometer to help characterizing the plasma. For the deposition of thin polymer films, lactic acid is chosen for its chemical stability, biocompatibility and biodegradability. The properties, compositions and microstructures of deposited films are also investigated to assure the success of deposition.",
keywords = "Atmospheric plasma, Optical emission/absorption spectra, Plasma chemistry, Polymer deposition",
author = "Chuan Li and Yu, {C. T.} and Hsieh, {J. H.}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 7th International Symposium on Next-Generation Electronics, ISNE 2018 ; Conference date: 07-05-2018 Through 09-05-2018",
year = "2018",
month = jun,
day = "22",
doi = "10.1109/ISNE.2018.8394732",
language = "English",
series = "Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
booktitle = "Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018",
address = "美國",
}