Deposition and device application of in situ boron-doped polycrystalline SiGe films grown at low temperatures

Horng-Chih Lin*, Tze Guei Jung, Hsiao Yi Lin, Chun Yen Chang, Tan Fu Lei, P. J. Wang, Ray Chern Deng, Jandel Lin, Chih Yeh Chao

*Corresponding author for this work

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Engineering

Material Science