Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

J. H. Hsieh*, W. Wu, C. Li, C. H. Yu, B. H. Tan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Scopus citations


Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 sccm during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices.

Original languageEnglish
Pages (from-to)233-237
Number of pages5
JournalSurface and Coatings Technology
StatePublished - 30 Jan 2003


  • Hard coating
  • Magnetron sputtering
  • Wear
  • X-ray diffraction


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