Defect Inspection Techniques in SiC

Keyphrases

• Silicon Carbide 100%
• Defect Inspection 100%
• Inspection Technique 100%
• Silicon Carbide Devices 100%
• Manufacturing Process 66%
• Defect Density 66%
• Inspection Technology 66%
• High Cost 33%
• Crystal Growth 33%
• Mass Production 33%
• Increased Demand 33%
• Silicon-based 33%
• Post-growth 33%
• Growth Techniques 33%
• High-purity Silicon 33%
• Killer Defects 33%
• Silicon Carbide Power Devices 33%
• Locating Defects 33%

Engineering

• Manufacturing Process 100%
• Defect Density 100%
• Inspection Technology 100%
• Power Device 50%
• Increasing Demand 50%
• Review Article 50%
• Mass Production 50%

Material Science

• Silicon Carbide 100%
• Defect Density 28%
• Silicon 14%
• Power Device 14%
• Crystal Growth 14%