Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

Yu Chieh Peng; Yu Jie Wang; Kuan Heng Chen; Yu Hung Lin; Haruyuki Sakurai; Hsueh Chih Chang; Cheng Ching Chiang; Ruei Tzu Duh; Bo Ray Lee; Chia Yen Huang; Min Hsiung Shih; Ray Hua Horng; Kuniaki Konishi; Ming Lun Tseng

doi:10.1021/acs.nanolett.4c05552

Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

Yu Chieh Peng, Yu Jie Wang, Kuan Heng Chen, Yu Hung Lin, Haruyuki Sakurai, Hsueh Chih Chang, Cheng Ching Chiang, Ruei Tzu Duh, Bo Ray Lee, Chia Yen Huang, Min Hsiung Shih, Ray Hua Horng, Kuniaki Konishi^*, Ming Lun Tseng^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In this work, we present aluminum nitride (AlN) metalenses as an efficient solution for DUV applications. These metalenses, with a thickness of only 380 nm, deliver DUV focusing and imaging capabilities close to the theoretical diffraction limit. Leveraging their robustness to intense ultrafast laser irradiation, we demonstrate successful DUV ultrafast laser direct writing of microstructures on a polymer film and silicon substrate. These results underscore the significant promise of advancing photonic technologies in this critical wavelength regime.

Original language	English
Pages (from-to)	3141-3149
Number of pages	9
Journal	Nano letters
Volume	25
Issue number	8
DOIs	https://doi.org/10.1021/acs.nanolett.4c05552
State	Published - 26 Feb 2025

Keywords

DUV imaging
deep ultraviolet light
laser direct writing
metalens
metasurface

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10.1021/acs.nanolett.4c05552

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title = "Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications",

abstract = "Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In this work, we present aluminum nitride (AlN) metalenses as an efficient solution for DUV applications. These metalenses, with a thickness of only 380 nm, deliver DUV focusing and imaging capabilities close to the theoretical diffraction limit. Leveraging their robustness to intense ultrafast laser irradiation, we demonstrate successful DUV ultrafast laser direct writing of microstructures on a polymer film and silicon substrate. These results underscore the significant promise of advancing photonic technologies in this critical wavelength regime.",

keywords = "DUV imaging, deep ultraviolet light, laser direct writing, metalens, metasurface",

author = "Peng, {Yu Chieh} and Wang, {Yu Jie} and Chen, {Kuan Heng} and Lin, {Yu Hung} and Haruyuki Sakurai and Chang, {Hsueh Chih} and Chiang, {Cheng Ching} and Duh, {Ruei Tzu} and Lee, {Bo Ray} and Huang, {Chia Yen} and Shih, {Min Hsiung} and Horng, {Ray Hua} and Kuniaki Konishi and Tseng, {Ming Lun}",

note = "Publisher Copyright: {\textcopyright} 2025 The Authors. Published by American Chemical Society.",

year = "2025",

month = feb,

day = "26",

doi = "10.1021/acs.nanolett.4c05552",

language = "English",

volume = "25",

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journal = "Nano letters",

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T1 - Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

AU - Peng, Yu Chieh

AU - Wang, Yu Jie

AU - Chen, Kuan Heng

AU - Lin, Yu Hung

AU - Sakurai, Haruyuki

AU - Chang, Hsueh Chih

AU - Chiang, Cheng Ching

AU - Duh, Ruei Tzu

AU - Lee, Bo Ray

AU - Huang, Chia Yen

AU - Shih, Min Hsiung

AU - Horng, Ray Hua

AU - Konishi, Kuniaki

AU - Tseng, Ming Lun

PY - 2025/2/26

Y1 - 2025/2/26

N2 - Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In this work, we present aluminum nitride (AlN) metalenses as an efficient solution for DUV applications. These metalenses, with a thickness of only 380 nm, deliver DUV focusing and imaging capabilities close to the theoretical diffraction limit. Leveraging their robustness to intense ultrafast laser irradiation, we demonstrate successful DUV ultrafast laser direct writing of microstructures on a polymer film and silicon substrate. These results underscore the significant promise of advancing photonic technologies in this critical wavelength regime.

AB - Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In this work, we present aluminum nitride (AlN) metalenses as an efficient solution for DUV applications. These metalenses, with a thickness of only 380 nm, deliver DUV focusing and imaging capabilities close to the theoretical diffraction limit. Leveraging their robustness to intense ultrafast laser irradiation, we demonstrate successful DUV ultrafast laser direct writing of microstructures on a polymer film and silicon substrate. These results underscore the significant promise of advancing photonic technologies in this critical wavelength regime.

KW - DUV imaging

KW - deep ultraviolet light

KW - laser direct writing

KW - metalens

KW - metasurface

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U2 - 10.1021/acs.nanolett.4c05552

DO - 10.1021/acs.nanolett.4c05552

M3 - Article

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SN - 1530-6984

VL - 25

SP - 3141

EP - 3149

JO - Nano letters

JF - Nano letters

IS - 8

ER -

Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications

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Keywords

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