Decomposition of trimethyl indium on Si (111)-7 × 7 studied with XPS, UPS and HREELS

Y. Bu; Jason C.S. Chu; Ming-Chang Lin

doi:10.1016/0167-577X(92)90158-G

Decomposition of trimethyl indium on Si (111)-7 × 7 studied with XPS, UPS and HREELS

Y. Bu^*
, Jason C.S. Chu
, Ming-Chang Lin

^*Corresponding author for this work

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH₃, CH₂, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.

Original language	English
Pages (from-to)	207-213
Number of pages	7
Journal	Materials Letters
Volume	14
Issue number	4
DOIs	https://doi.org/10.1016/0167-577X(92)90158-G
State	Published - 1 Jan 1992

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title = "Decomposition of trimethyl indium on Si (111)-7 × 7 studied with XPS, UPS and HREELS",

abstract = "The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH3, CH2, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.",

author = "Y. Bu and Chu, \{Jason C.S.\} and Ming-Chang Lin",

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AU - Bu, Y.

AU - Chu, Jason C.S.

AU - Lin, Ming-Chang

PY - 1992/1/1

Y1 - 1992/1/1

N2 - The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH3, CH2, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.

AB - The techniques of XPS, UPS and HREELS are utilized to investigate the thermal decomposition of trimethyl indium (TMIn) on Si (111) -7 × 7. At 120 K, TMIn was primarily molecularly adsorbed on the surface. As the sample was annealed at higher temperatures, species such as CH3, CH2, In, C and H, etc., were identified. At temperatures above 950 K, SiC was the only species detected.

UR - https://www.scopus.com/pages/publications/0026910471

U2 - 10.1016/0167-577X(92)90158-G

DO - 10.1016/0167-577X(92)90158-G

M3 - Article

AN - SCOPUS:0026910471

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VL - 14

SP - 207

EP - 213

JO - Materials Letters

JF - Materials Letters

IS - 4

ER -

Decomposition of trimethyl indium on Si (111)-7 × 7 studied with XPS, UPS and HREELS

Abstract

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