High operation frequency SPST and SPOT switches based on commercial 0.15-μm GaAs pHEMT are developed. A novel integrated CPW line structure, which integrates the device, signal line and ground into the CPW line structure, is proposed. By using this structure, the limitation of the traveling wave switch caused by the parasitic inductance between the device to signal and ground in the conventional microstrip line designs can be removed. From the measurement results, high operation frequency of 135 GHz is achieved. The SPST switch achieves less then 5 dB insertion loss from DC to 135 GHz. The SPDT switch achieves less than 6 dB insertion loss from 15 GHz to 135 GHz. This switch has the highest operation frequency among the reported traveling wave switches.