Crystallinity Effect on Reliability of Sidewall Damascened Nanowire Poly-Si GAA FETs

Chuan Hui Shen, Wei Yen Chen, Chun Chih Chung, Yu En Huang, Tien-Sheng Chao*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science

Chemical Compounds