Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

Yu Chih Lin; Feng Tang Chang; Hsun-Ling Bai; Bau Shei Pei

doi:10.1016/j.jhazmat.2004.12.035

Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

Yu Chih Lin, Feng Tang Chang, Hsun-Ling Bai^*, Bau Shei Pei

^*Corresponding author for this work

Institute of Environmental Engineering

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10°C, it is relatively higher than the traditional condenser reaction temperature. Both VOCs and water vapors were condensed and formed liquid films. This resulted in an enhancement of the VOCs removals, especially for VOCs of high boiling points or solubility. This can help to prevent the follow up zeolite concentrator from damage. The performance of the integrated system of condenser/zeolite concentrator could, therefore, remain highly efficient for a longer operation time. Its annualized cost would also be lower than installing the zeolite concentrator only.

Original language	English
Pages (from-to)	9-14
Number of pages	6
Journal	Journal of Hazardous Materials
Volume	120
Issue number	1-3
DOIs	https://doi.org/10.1016/j.jhazmat.2004.12.035
State	Published - 11 Apr 2005

Keywords

Adsorbent
DMDS
DMS
Optoelectronic industry
Semiconductor
TFT-LCD
Volatile organic compounds

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10.1016/j.jhazmat.2004.12.035

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@article{a3d0d917853f45d7bb80f8348ecebd2c,

title = "Control of VOCs emissions by condenser pre-treatment in a semiconductor fab",

abstract = "The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10°C, it is relatively higher than the traditional condenser reaction temperature. Both VOCs and water vapors were condensed and formed liquid films. This resulted in an enhancement of the VOCs removals, especially for VOCs of high boiling points or solubility. This can help to prevent the follow up zeolite concentrator from damage. The performance of the integrated system of condenser/zeolite concentrator could, therefore, remain highly efficient for a longer operation time. Its annualized cost would also be lower than installing the zeolite concentrator only.",

keywords = "Adsorbent, DMDS, DMS, Optoelectronic industry, Semiconductor, TFT-LCD, Volatile organic compounds",

author = "Lin, {Yu Chih} and Chang, {Feng Tang} and Hsun-Ling Bai and Pei, {Bau Shei}",

year = "2005",

month = apr,

day = "11",

doi = "10.1016/j.jhazmat.2004.12.035",

language = "English",

volume = "120",

pages = "9--14",

journal = "Journal of Hazardous Materials",

issn = "0304-3894",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

AU - Lin, Yu Chih

AU - Chang, Feng Tang

AU - Bai, Hsun-Ling

AU - Pei, Bau Shei

PY - 2005/4/11

Y1 - 2005/4/11

N2 - The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10°C, it is relatively higher than the traditional condenser reaction temperature. Both VOCs and water vapors were condensed and formed liquid films. This resulted in an enhancement of the VOCs removals, especially for VOCs of high boiling points or solubility. This can help to prevent the follow up zeolite concentrator from damage. The performance of the integrated system of condenser/zeolite concentrator could, therefore, remain highly efficient for a longer operation time. Its annualized cost would also be lower than installing the zeolite concentrator only.

AB - The performance of a modified design of local condensers to pre-treat a variety of volatile organic compounds (VOCs) emitted from the stripping process of a semiconductor fab was tested in this study. The reaction temperature of the condensers was controlled at around 10°C, it is relatively higher than the traditional condenser reaction temperature. Both VOCs and water vapors were condensed and formed liquid films. This resulted in an enhancement of the VOCs removals, especially for VOCs of high boiling points or solubility. This can help to prevent the follow up zeolite concentrator from damage. The performance of the integrated system of condenser/zeolite concentrator could, therefore, remain highly efficient for a longer operation time. Its annualized cost would also be lower than installing the zeolite concentrator only.

KW - Adsorbent

KW - DMDS

KW - DMS

KW - Optoelectronic industry

KW - Semiconductor

KW - TFT-LCD

KW - Volatile organic compounds

UR - http://www.scopus.com/inward/record.url?scp=16344376728&partnerID=8YFLogxK

U2 - 10.1016/j.jhazmat.2004.12.035

DO - 10.1016/j.jhazmat.2004.12.035

M3 - Article

C2 - 15811658

AN - SCOPUS:16344376728

SN - 0304-3894

VL - 120

SP - 9

EP - 14

JO - Journal of Hazardous Materials

JF - Journal of Hazardous Materials

IS - 1-3

ER -

Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

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Keywords

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