Control of powder formation in silane discharge by cathode heating and hydrogen dilution for high-rate deposition of hydrogenated amorphous silicon thin films

  • Ratnabali Banerjee*
  • , S. N. Sharma
  • , S. Chattopadhyay
  • , A. K. Batabyal
  • , A. K. Barua
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Control of powder formation in silane discharge by cathode heating and hydrogen dilution for high-rate deposition of hydrogenated amorphous silicon thin films'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Chemical Engineering