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Combination effects of nitrogen implantation at S/D extension and N 2 O oxide on 0.18 μm n- and p-MOSFETs
Tien-Sheng Chao*, Chao-Hsin Chien, S. K. Chiao, Horng-Chih Lin, M. C. Liaw, L. P. Chen, T. Y. Huang, T. F. Lei, C. Y. Chang
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
1
Scopus
citations