CMOS SPAD Imager Array for Wide Radiation Temperature Sensing and Thermal Imaging

Hui Chen Tsai, Chun Hsien Liu, Sheng Di Lin, Chia Ming Tsai, Jau Yang Wu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80μm.

Original languageEnglish
Pages (from-to)20230-20237
Number of pages8
JournalIEEE Sensors Journal
Volume22
Issue number21
DOIs
StatePublished - 1 Nov 2022

Keywords

  • Radiometry
  • single-photon avalanche diode (SPAD)

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