CMOS SPAD IMAGER ARRAY FOR WIDE RADIATION TEMPERATURE SENSING AND THERMAL IMAGING

Hui Chen Tsai, Chun Hsien Liu, Sheng Di Lin, Chia Ming Tsai, Jau Yang Wu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We have demonstrated a wide radiation temperature measurement by using a single photon avalanche diode (SPAD) image array that is analogous to a Silicon Photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference value (NETD) below 1 °C. Thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature with a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80 μm.

Original languageEnglish
Pages (from-to)1
Number of pages1
JournalIEEE Sensors Journal
DOIs
StateAccepted/In press - 2022

Keywords

  • Cameras
  • Photonics
  • Radiometry
  • Sensors
  • single photon avalanche diode
  • Single-photon avalanche diodes
  • Temperature distribution
  • Temperature measurement
  • Temperature sensors

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