CMOS MEMS Resonator for Physical Reservoir Computing

Yi Chiu, Fang Wei Tsai, Liang Kai Wang, Yuan Chieh Lee, Manu Garg, Hao Chiao Hong

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents a CMOS-MEMS clamped-clamped (CC) beam for physical reservoir computing. The device is designed and fabricated in the CMOS back-end-of-line (BEOL) metal and oxide layers. The resonant beam is electrostatically actuated to operate in the nonlinear states for delay-based physical reservoir computing. The closed-loop reservoir computing is realized by the nonlinear CC beam, a field programmable gate array (FPGA) controller, and a lock-in amplifier. The fabricated and post-processed CMOS MEMS device were characterized. Preliminary parity benchmark tests in different test conditions are presented.

Original languageEnglish
Title of host publication2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350303872
DOIs
StatePublished - 2023
Event2023 IEEE SENSORS, SENSORS 2023 - Vienna, Austria
Duration: 29 Oct 20231 Nov 2023

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference2023 IEEE SENSORS, SENSORS 2023
Country/TerritoryAustria
CityVienna
Period29/10/231/11/23

Keywords

  • CMOS MEMS
  • FPGA
  • clamped-clamped beam
  • parity benchmark
  • physical reservoir computing

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