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Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array

  • Ju Wei Wang
  • , Hsin Hung Lin
  • , Sheng I. Kuo
  • , Zohauddin Ahmad
  • , Ping Yen Hsieh
  • , Chung Yu Hsu
  • , Jin Wei Shi
  • , You Chia Chang*
  • *Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 µm.

Original languageEnglish
StatePublished - 2024
Event2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of
Duration: 4 Aug 20248 Aug 2024

Conference

Conference2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/TerritoryKorea, Republic of
CityIncheon
Period4/08/248/08/24

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