Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array

Ju Wei Wang; Hsin Hung Lin; Sheng I. Kuo; Zohauddin Ahmad; Ping Yen Hsieh; Chung Yu Hsu; Jin Wei Shi; You Chia Chang

Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array

Ju Wei Wang, Hsin Hung Lin, Sheng I. Kuo, Zohauddin Ahmad, Ping Yen Hsieh, Chung Yu Hsu, Jin Wei Shi, You Chia Chang^*

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to conference › Paper › peer-review

Abstract

We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 µm.

Original language	English
State	Published - 2024
Event	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of Duration: 4 Aug 2024 → 8 Aug 2024

Conference

Conference	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/Territory	Korea, Republic of
City	Incheon
Period	4/08/24 → 8/08/24

Cite this

@conference{47e0195af80842c7bf2837198cbbebc1,

title = "Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array",

abstract = "We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 µm.",

author = "Wang, {Ju Wei} and Lin, {Hsin Hung} and Kuo, {Sheng I.} and Zohauddin Ahmad and Hsieh, {Ping Yen} and Hsu, {Chung Yu} and Shi, {Jin Wei} and Chang, {You Chia}",

note = "Publisher Copyright: {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 08-08-2024",

year = "2024",

language = "English",

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TY - CONF

T1 - Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array

AU - Wang, Ju Wei

AU - Lin, Hsin Hung

AU - Kuo, Sheng I.

AU - Ahmad, Zohauddin

AU - Hsieh, Ping Yen

AU - Hsu, Chung Yu

AU - Shi, Jin Wei

AU - Chang, You Chia

PY - 2024

Y1 - 2024

N2 - We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 µm.

AB - We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and reconstruct 3D topology images that resolve a height difference of 8.05 µm.

UR - http://www.scopus.com/inward/record.url?scp=85216119657&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:85216119657

T2 - 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024

Y2 - 4 August 2024 through 8 August 2024

ER -

Chip-scale Confocal Laser-scanning Microscope Based on Optical Phased Array

Abstract

Conference

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