Chemical bath deposition of IrO2 films on ITO substrate

Jing Yu Chen; Yong Min Chen; Yu Sun; Jyh Fu Lee; San-Yuan Chen; Po Chun Chen; Pu-Wei Wu

doi:10.1016/j.ceramint.2014.06.098

Chemical bath deposition of IrO₂ films on ITO substrate

Jing Yu Chen, Yong Min Chen, Yu Sun, Jyh Fu Lee, San-Yuan Chen, Po Chun Chen^*, Pu-Wei Wu

^*Corresponding author for this work

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

A chemical bath is shown to deposit an IrO₂ film on an ITO substrate. The chemical bath is prepared by mixing an Ir precursor (Na ₃IrCl₆·xH₂O), an oxidizer (NaClO), a complexing agent (NaNO₂), and a complex agent/stabilizer (NaOH) in an aqueous solution at a molar ratio of 1:1.5:10:30. From the UV-vis absorption spectra, complexes such as [Ir(OH)₆]m^3-, [Ir(NO ₂)₄Cl₂]^3-, and [Ir(NO ₂)₃Cl₃]^3- are identified. These complexes are relatively stable, minimizing the undesirable homogeneous precipitation of IrO₂ nanoparticles in favor of the heterogeneous growth of the IrO₂ film on the ITO substrate. Diffraction patterns from the as-deposited IrO₂ film reveal an amorphous structure. In addition, profiles from X-ray absorption spectroscopy and X-ray photoelectron spectroscopy indicate that the oxidation state of the Ir in the as-deposited IrO₂ film is +4. Thermogravimetric analysis confirms the inclusion of 10 wt% hydrated water in the as-deposited IrO₂ film. Scanning electron microscope images reveal a continuous solid film with a smooth surface. The amorphous IrO₂ film becomes rutile IrO₂ phase after a mild heat treatment in air.

Original language	English
Pages (from-to)	14983-14990
Number of pages	8
Journal	Ceramics International
Volume	40
Issue number	9 PART B
DOIs	https://doi.org/10.1016/j.ceramint.2014.06.098
State	Published - 2014

Keywords

Chemical bath deposition
Indium tin oxide
Iridium oxide
Thin film

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title = "Chemical bath deposition of IrO2 films on ITO substrate",

abstract = "A chemical bath is shown to deposit an IrO2 film on an ITO substrate. The chemical bath is prepared by mixing an Ir precursor (Na 3IrCl6·xH2O), an oxidizer (NaClO), a complexing agent (NaNO2), and a complex agent/stabilizer (NaOH) in an aqueous solution at a molar ratio of 1:1.5:10:30. From the UV-vis absorption spectra, complexes such as [Ir(OH)6]m3-, [Ir(NO 2)4Cl2]3-, and [Ir(NO 2)3Cl3]3- are identified. These complexes are relatively stable, minimizing the undesirable homogeneous precipitation of IrO2 nanoparticles in favor of the heterogeneous growth of the IrO2 film on the ITO substrate. Diffraction patterns from the as-deposited IrO2 film reveal an amorphous structure. In addition, profiles from X-ray absorption spectroscopy and X-ray photoelectron spectroscopy indicate that the oxidation state of the Ir in the as-deposited IrO2 film is +4. Thermogravimetric analysis confirms the inclusion of 10 wt% hydrated water in the as-deposited IrO2 film. Scanning electron microscope images reveal a continuous solid film with a smooth surface. The amorphous IrO2 film becomes rutile IrO2 phase after a mild heat treatment in air.",

keywords = "Chemical bath deposition, Indium tin oxide, Iridium oxide, Thin film",

author = "Chen, {Jing Yu} and Chen, {Yong Min} and Yu Sun and Lee, {Jyh Fu} and San-Yuan Chen and Chen, {Po Chun} and Pu-Wei Wu",

year = "2014",

doi = "10.1016/j.ceramint.2014.06.098",

language = "English",

volume = "40",

pages = "14983--14990",

journal = "Ceramics International",

issn = "0272-8842",

publisher = "Elsevier Ltd",

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T1 - Chemical bath deposition of IrO2 films on ITO substrate

AU - Chen, Jing Yu

AU - Chen, Yong Min

AU - Sun, Yu

AU - Lee, Jyh Fu

AU - Chen, San-Yuan

AU - Chen, Po Chun

AU - Wu, Pu-Wei

PY - 2014

Y1 - 2014

N2 - A chemical bath is shown to deposit an IrO2 film on an ITO substrate. The chemical bath is prepared by mixing an Ir precursor (Na 3IrCl6·xH2O), an oxidizer (NaClO), a complexing agent (NaNO2), and a complex agent/stabilizer (NaOH) in an aqueous solution at a molar ratio of 1:1.5:10:30. From the UV-vis absorption spectra, complexes such as [Ir(OH)6]m3-, [Ir(NO 2)4Cl2]3-, and [Ir(NO 2)3Cl3]3- are identified. These complexes are relatively stable, minimizing the undesirable homogeneous precipitation of IrO2 nanoparticles in favor of the heterogeneous growth of the IrO2 film on the ITO substrate. Diffraction patterns from the as-deposited IrO2 film reveal an amorphous structure. In addition, profiles from X-ray absorption spectroscopy and X-ray photoelectron spectroscopy indicate that the oxidation state of the Ir in the as-deposited IrO2 film is +4. Thermogravimetric analysis confirms the inclusion of 10 wt% hydrated water in the as-deposited IrO2 film. Scanning electron microscope images reveal a continuous solid film with a smooth surface. The amorphous IrO2 film becomes rutile IrO2 phase after a mild heat treatment in air.

AB - A chemical bath is shown to deposit an IrO2 film on an ITO substrate. The chemical bath is prepared by mixing an Ir precursor (Na 3IrCl6·xH2O), an oxidizer (NaClO), a complexing agent (NaNO2), and a complex agent/stabilizer (NaOH) in an aqueous solution at a molar ratio of 1:1.5:10:30. From the UV-vis absorption spectra, complexes such as [Ir(OH)6]m3-, [Ir(NO 2)4Cl2]3-, and [Ir(NO 2)3Cl3]3- are identified. These complexes are relatively stable, minimizing the undesirable homogeneous precipitation of IrO2 nanoparticles in favor of the heterogeneous growth of the IrO2 film on the ITO substrate. Diffraction patterns from the as-deposited IrO2 film reveal an amorphous structure. In addition, profiles from X-ray absorption spectroscopy and X-ray photoelectron spectroscopy indicate that the oxidation state of the Ir in the as-deposited IrO2 film is +4. Thermogravimetric analysis confirms the inclusion of 10 wt% hydrated water in the as-deposited IrO2 film. Scanning electron microscope images reveal a continuous solid film with a smooth surface. The amorphous IrO2 film becomes rutile IrO2 phase after a mild heat treatment in air.

KW - Chemical bath deposition

KW - Indium tin oxide

KW - Iridium oxide

KW - Thin film

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DO - 10.1016/j.ceramint.2014.06.098

M3 - Article

AN - SCOPUS:84905911805

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VL - 40

SP - 14983

EP - 14990

JO - Ceramics International

JF - Ceramics International

IS - 9 PART B

ER -

Chemical bath deposition of IrO₂ films on ITO substrate

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