Characterization of Oxide Layers on AlGaN Based DUV LEDs by TEM/STEM Analysis

Jong Shing Bow*, Jay Wang, Wei Chih Lai, Tien Yu Wang, Syuan Yu Sie, Sheng Po Chang, Cheng Huang Kuo, Jinn Kong Sheu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science