Characteristics of YBa2Cu3O7 thin films deposited on substrates buffered by various TiO2 layers

Po Iem Lin; Chia Wen Liu; Chich Chang Hsieh; Kaung-Hsiung Wu; Jenh-Yih Juang; Tseng Ming Uen; Jiunn-Yuan Lin; Yih Shung Gou

doi:10.1143/JJAP.40.L377

Characteristics of YBa₂Cu₃O₇ thin films deposited on substrates buffered by various TiO₂ layers

Po Iem Lin^*, Chia Wen Liu, Chich Chang Hsieh, Kaung-Hsiung Wu, Jenh-Yih Juang, Tseng Ming Uen, Jiunn-Yuan Lin, Yih Shung Gou

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Titanium nitride (TIN) and superconducting YBa₂Cu₃O₇ (YBCO) thin films have been deposited sequentially on SrTiO₃(STO)(100) substrates by in situ pulsed laser ablation. The TiN films were originally intended to serve as the lower contact electrode of the c-axis YBCO thin films. It was found that, although high-quality YBCO films could be obtained with the YBCO/TiN/STO(100) bilayer structure, the TiN(100) layer was oxidized which changed the structure into YBCO/TiO₂/STO(100) during YBCO deposition. Comparative studies of depositing YBCO films directly onto a dc-sputtered TiO₂/STO(100) template conventionally used in the selective epitaxial growth (SEG) process have, however, resulted in formation of a nonsuperconducting YBCO top layer. The characteristics of the resultant TiO₂ layers obtained using various processes were analyzed to delineate the apparent discrepancies.

Original language	English
Pages (from-to)	L377-L379
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	40
Issue number	4 B
DOIs	https://doi.org/10.1143/JJAP.40.L377
State	Published - 15 Apr 2001

Keywords

Oxidation of TiN
Pulsed laser deposition
Selective epitaxial growth process
TiN films
YBCO/TiO/STO bilayer structure

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title = "Characteristics of YBa2Cu3O7 thin films deposited on substrates buffered by various TiO2 layers",

abstract = "Titanium nitride (TIN) and superconducting YBa2Cu3O7 (YBCO) thin films have been deposited sequentially on SrTiO3(STO)(100) substrates by in situ pulsed laser ablation. The TiN films were originally intended to serve as the lower contact electrode of the c-axis YBCO thin films. It was found that, although high-quality YBCO films could be obtained with the YBCO/TiN/STO(100) bilayer structure, the TiN(100) layer was oxidized which changed the structure into YBCO/TiO2/STO(100) during YBCO deposition. Comparative studies of depositing YBCO films directly onto a dc-sputtered TiO2/STO(100) template conventionally used in the selective epitaxial growth (SEG) process have, however, resulted in formation of a nonsuperconducting YBCO top layer. The characteristics of the resultant TiO2 layers obtained using various processes were analyzed to delineate the apparent discrepancies.",

keywords = "Oxidation of TiN, Pulsed laser deposition, Selective epitaxial growth process, TiN films, YBCO/TiO/STO bilayer structure",

author = "Lin, {Po Iem} and Liu, {Chia Wen} and Hsieh, {Chich Chang} and Kaung-Hsiung Wu and Jenh-Yih Juang and Uen, {Tseng Ming} and Jiunn-Yuan Lin and Gou, {Yih Shung}",

year = "2001",

month = apr,

day = "15",

doi = "10.1143/JJAP.40.L377",

language = "English",

volume = "40",

pages = "L377--L379",

journal = "Japanese Journal of Applied Physics",

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T1 - Characteristics of YBa2Cu3O7 thin films deposited on substrates buffered by various TiO2 layers

AU - Lin, Po Iem

AU - Liu, Chia Wen

AU - Hsieh, Chich Chang

AU - Wu, Kaung-Hsiung

AU - Juang, Jenh-Yih

AU - Uen, Tseng Ming

AU - Lin, Jiunn-Yuan

AU - Gou, Yih Shung

PY - 2001/4/15

Y1 - 2001/4/15

N2 - Titanium nitride (TIN) and superconducting YBa2Cu3O7 (YBCO) thin films have been deposited sequentially on SrTiO3(STO)(100) substrates by in situ pulsed laser ablation. The TiN films were originally intended to serve as the lower contact electrode of the c-axis YBCO thin films. It was found that, although high-quality YBCO films could be obtained with the YBCO/TiN/STO(100) bilayer structure, the TiN(100) layer was oxidized which changed the structure into YBCO/TiO2/STO(100) during YBCO deposition. Comparative studies of depositing YBCO films directly onto a dc-sputtered TiO2/STO(100) template conventionally used in the selective epitaxial growth (SEG) process have, however, resulted in formation of a nonsuperconducting YBCO top layer. The characteristics of the resultant TiO2 layers obtained using various processes were analyzed to delineate the apparent discrepancies.

AB - Titanium nitride (TIN) and superconducting YBa2Cu3O7 (YBCO) thin films have been deposited sequentially on SrTiO3(STO)(100) substrates by in situ pulsed laser ablation. The TiN films were originally intended to serve as the lower contact electrode of the c-axis YBCO thin films. It was found that, although high-quality YBCO films could be obtained with the YBCO/TiN/STO(100) bilayer structure, the TiN(100) layer was oxidized which changed the structure into YBCO/TiO2/STO(100) during YBCO deposition. Comparative studies of depositing YBCO films directly onto a dc-sputtered TiO2/STO(100) template conventionally used in the selective epitaxial growth (SEG) process have, however, resulted in formation of a nonsuperconducting YBCO top layer. The characteristics of the resultant TiO2 layers obtained using various processes were analyzed to delineate the apparent discrepancies.

KW - Oxidation of TiN

KW - Pulsed laser deposition

KW - Selective epitaxial growth process

KW - TiN films

KW - YBCO/TiO/STO bilayer structure

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U2 - 10.1143/JJAP.40.L377

DO - 10.1143/JJAP.40.L377

M3 - Article

AN - SCOPUS:0035870386

SN - 0021-4922

VL - 40

SP - L377-L379

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 4 B

ER -

Characteristics of YBa₂Cu₃O₇ thin films deposited on substrates buffered by various TiO₂ layers

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