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Characteristics of the inter-poly Al2O3 dielectrics on NH3-nitrided bottom poly-Si for next-generation flash memories

  • Yeong Yuh Chen
  • , Chao-Hsin Chien*
  • , Jen Chung Lou
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

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Material Science