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Characteristics of fluorinated amorphous carbon films and implementation of 0.15 μm Cu/a-C:F damascene interconnection
Jia Min Shieh*, Shich Chang Suen, Kou Chiang Tsai, Bau Tong Dai, Yew-Chuhg Wu, Yu Hen Wu
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
15
Scopus
citations