Bosch etching for the creation of a 3D nanoelectroporation system for high throughput gene delivery

Keyphrases

• Three-dimensional (3D) 100%
• High-throughput 100%
• Gene Delivery 100%
• Bosch Etching 100%
• Nanoelectroporation 100%
• Electroporation 75%
• Etching Rate 50%
• Nanochannel 50%
• Wafer 25%
• Fluorescence Imaging 25%
• Feature Density 25%
• Front Surface 25%
• Silicon Devices 25%
• Biomolecules 25%
• Etching Process 25%
• Cell Viability 25%
• Mechanical Stability 25%
• Si Devices 25%
• Wafer-scale 25%
• Transfection Efficiency 25%
• Array of Channels 25%
• Three-dimensional Arrays 25%
• Cell Transfection 25%
• Reduced Cell 25%
• Localized Delivery 25%
• Membrane Damage 25%
• Biomolecule Delivery 25%
• Cell Mortality 25%
• Circular Channel 25%
• Transfection System 25%
• Microchannel Array 25%

Engineering

• Feature Size 100%
• Microchannel 100%
• Etch Rate 100%
• Back Side 50%
• Front Side 50%
• Silicon Device 50%
• Biomolecule 50%
• Etching Process 50%
• Si Device 50%
• Dimensional Array 50%
• Mechanical Stability 50%
• Feature Density 50%
• Circular Channel 50%
• Biomolecule Delivery 50%

Material Science

• Density 100%
• Silicon Device 50%
• Mechanical Stability 50%