Abstract
The heteroeptixial integration of the III-V semiconductor compound, which was limited by lattice mismatch, can now be accomplished by using the wafer bonding process. In this study, a line-patterned In0.5Ga 0.5P layer was successfully transferred to the GaP wafer through the wafer bonding process for the successive growth of high-brightness light-emitting diode (LED) structures.
Original language | English |
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Journal | Electrochemical and Solid-State Letters |
Volume | 8 |
Issue number | 2 |
DOIs | |
State | Published - 21 Feb 2005 |