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Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films

  • S. Chattopadhyay*
  • , L. C. Chen
  • , S. C. Chien
  • , S. T. Lin
  • , K. H. Chen
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

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