Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups

Chi Hung Lee*, Yi Chiu, Han Ping D Shieh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


A pop-up binary-phase migrating and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE Mode was 21.4%.

Original languageEnglish
Article number084601
JournalOptical Engineering
Issue number8
StatePublished - 1 Aug 2007


  • Binary-phase grating
  • Diffraction efficiency ratio
  • Optical pickup
  • Polarization beamsplitter
  • Silicon nitride


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