@inbook{a02a5bb38f484725b85f0cb00c4c1b1a,
title = "Big Data Analytics for Semiconductor Manufacturing",
abstract = "Big data involves datasets of sizes that exceed the capabilities of typical database software tools to capture, store, manage, and analyze [1]. The definition of big data analytics can be viewed from various perspectives.",
author = "Chen, {Tin Chih Toly}",
note = "Publisher Copyright: {\textcopyright} 2023, The Author(s), under exclusive license to Springer Nature Switzerland AG.",
year = "2023",
doi = "10.1007/978-3-031-14065-5_1",
language = "English",
series = "SpringerBriefs in Applied Sciences and Technology",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "1--19",
booktitle = "SpringerBriefs in Applied Sciences and Technology",
address = "德國",
}