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Beyond Substrates: Strain Engineering of Ferroelectric Membranes
David Pesquera
*
, Eric Parsonnet
, Alexander Qualls
, Ruijuan Xu
, Andrew J. Gubser
, Jieun Kim
, Yizhe Jiang
, Gabriel Velarde
,
Yen-Lin Huang
, Harold Y. Hwang
, Ramamoorthy Ramesh
, Lane W. Martin
*
Corresponding author for this work
Department of Materials Science and Engineering
Research output
:
Contribution to journal
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Article
›
peer-review
109
Scopus citations
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Keyphrases
Capacitors
33%
CMOS Technology
33%
Coercive Field
33%
Crystal Quality
33%
Deterministic Control
33%
Dielectric Permittivity
33%
Engineered Substrate
33%
Epitaxial Growth
33%
Epitaxial Lift-off
33%
Ferroelectric BaTiO3
33%
Ferroelectric Domain Dynamics
33%
Ferroelectric Membrane
100%
Ferroelectric Memory
33%
Ferroelectric Oxides
33%
Ferroelectric Switching Dynamics
33%
Flexible Nanosensor
33%
Flexible Polymer
33%
High-crystalline
33%
Interlayer Stress
66%
Material Phase
33%
Material Properties
33%
Material Structure
33%
Mechanical Tunability
33%
Metal Structure
33%
Ordering Temperature
33%
Oxide Metal
66%
Perovskite Oxide
33%
Room Temperature
33%
Strain Engineering
100%
Strain State
33%
Structural Tuning
33%
Structure Phase
33%
Structure-property Relationships
33%
Substrate Clamping
33%
Substrate Strain
100%
Switching Time
33%
Thick Film
33%
Trilayer
33%
Ultrafast
33%
Ultrasensitive
33%
Engineering
Coercive Field
50%
Crystalline Quality
50%
Dielectrics
50%
Engineering Strain
100%
Integrated Circuit
100%
Interlayer
100%
Nanoscale
50%
Nanosensor
50%
Phase Structure
50%
Released Membrane
50%
Room Temperature
50%
Strain State
50%
Switching Time
50%
Material Science
Capacitor
20%
Epitaxy
20%
Ferroelectric Material
100%
Film
20%
Materials Property
20%
Materials Structure
20%
Metal Oxide
40%
Oxide Compound
20%
Permittivity
20%
Silicon
20%
Thick Films
20%