BEOL-Compatible multiple metal-ferroelectric-metal (m-MFM) FETs designed for low voltage (2.5 V), high density, and excellent reliability

Meng Hui Yan, Ming Hung Wu, Hsin Hui Huang, Yu Hao Chen, Yueh Hua Chu, Tian-Li Wu, Po Chun Yeh, Chih Yao Wang, Yu De Lin, Jian Wei Su, Pei Jer Tzeng, Shyh Shyuan Sheu, Wei Chung Lo, Chih I. Wu, Tuo-Hung Hou*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

14 Scopus citations

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Material Science

Engineering