BEOL-Compatible multiple metal-ferroelectric-metal (m-MFM) FETs designed for low voltage (2.5 V), high density, and excellent reliability
- Meng Hui Yan
- , Ming Hung Wu
- , Hsin Hui Huang
- , Yu Hao Chen
- , Yueh Hua Chu
- , Tian-Li Wu
- , Po Chun Yeh
- , Chih Yao Wang
- , Yu De Lin
- , Jian Wei Su
- , Pei Jer Tzeng
- , Shyh Shyuan Sheu
- , Wei Chung Lo
- , Chih I. Wu
- , Tuo-Hung Hou*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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