Beam shaping with diffractive optics for laser micro-machining of plastics with a femtosecond laser

Kittichai Sojiphan*, Miranda Marcus, Hae Woon Choi, Chunmeng Lu, Avraham Benatar, Dave F. Farson, L. James Lee

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

Microfluidic devices and micro-electro-mechanical systems (MEMS) have become one of the most interesting and important applications in biotechnology, biomedical, pharmaceutical, life sciences, and agriculture. Research in manufacturing technologies used to fabricate these devices is important for improved quality as well as for time and cost savings during mass productions. A new approach for the fabrication of these MEMS devices is the laser ablation using diffractive optics elements (DOE) for beam shaping. In results described in this report, a 775 nm-wavelength high power femtosecond laser was used to ablate circular channels on polystyrene specimens. This approach to creating channels in the polystyrene was found to be promising even though the DOE used was not optimized for the femtosecond laser wavelength.

Original languageEnglish
Pages2296-2299
Number of pages4
StatePublished - May 2006
EventSociety of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, United States
Duration: 7 May 200611 May 2006

Conference

ConferenceSociety of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006
Country/TerritoryUnited States
CityCharlotte, NC
Period7/05/0611/05/06

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