(Ba,Sr)TiO3 thin films: Preparation, properties and reliability

Tseung-Yuen Tseng*

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    6 Scopus citations

    Abstract

    (Ba,Sr)TiO3 thin films are important capacitor materials for future gigabit era dynamic random access memory (DRAM) applications. This article reviews the technological aspects of BST films, including thin films deposition techniques, post annealing, physical, electrical and dielectric characteristics of the films, effects of bottom electrode materials, complex plane analysis of AC electrical, dielectric relaxation, and defect and reliability phenomena associated with the films. In addition, possible future developments are briefly summarized.

    Original languageEnglish
    Pages (from-to)1-13
    Number of pages13
    JournalFerroelectrics
    Volume232
    Issue number1-4
    DOIs
    StatePublished - 1 Jan 1999

    Keywords

    • BST
    • Properties
    • Reliability
    • Thin films

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