Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Y. C. Su; C. C. Chiou; V. Marinova; Shiuan-Huei Lin; N. Bozhinov; B. Blagoev; T. Babeva; Ken-Yuh Hsu; D. Z. Dimitrov

doi:10.1007/s11082-018-1469-1

Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Y. C. Su, C. C. Chiou, V. Marinova, Shiuan-Huei Lin, N. Bozhinov^*, B. Blagoev, T. Babeva, Ken-Yuh Hsu, D. Z. Dimitrov

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

Original language	English
Article number	205
Pages (from-to)	1-7
Number of pages	7
Journal	Optical and Quantum Electronics
Volume	50
Issue number	5
DOIs	https://doi.org/10.1007/s11082-018-1469-1
State	Published - 1 May 2018

Keywords

Al-doped ZnO layers
ALD technique
Liquid crystal displays
Transparent conductive layers

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title = "Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications",

abstract = "Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.",

keywords = "Al-doped ZnO layers, ALD technique, Liquid crystal displays, Transparent conductive layers",

author = "Su, {Y. C.} and Chiou, {C. C.} and V. Marinova and Shiuan-Huei Lin and N. Bozhinov and B. Blagoev and T. Babeva and Ken-Yuh Hsu and Dimitrov, {D. Z.}",

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T1 - Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

AU - Su, Y. C.

AU - Chiou, C. C.

AU - Marinova, V.

AU - Lin, Shiuan-Huei

AU - Bozhinov, N.

AU - Blagoev, B.

AU - Babeva, T.

AU - Hsu, Ken-Yuh

AU - Dimitrov, D. Z.

PY - 2018/5/1

Y1 - 2018/5/1

N2 - Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

AB - Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

KW - Al-doped ZnO layers

KW - ALD technique

KW - Liquid crystal displays

KW - Transparent conductive layers

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Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

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Keywords

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