Atomic layer-deposited al-doped ZnO thin films for display applications

Dimitre Dimitrov; Che Liang Tsai; Stefan Petrov; Vera Marinova; Dimitrina Petrova; Blagovest Napoleonov; Blagoy Blagoev; Velichka Strijkova; Ken-Yuh Hsu; Shiuan-Huei Lin

doi:10.3390/COATINGS10060539

Atomic layer-deposited al-doped ZnO thin films for display applications

Dimitre Dimitrov^*, Che Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken-Yuh Hsu, Shiuan-Huei Lin

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

Original language	English
Article number	539
Pages (from-to)	1-11
Number of pages	11
Journal	Coatings
Volume	10
Issue number	6
DOIs	https://doi.org/10.3390/COATINGS10060539
State	Published - Jun 2020

Keywords

Al-doped ZnO
ALD technique
Flexible PDLC devices
LC display
Transparent conductive layers

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title = "Atomic layer-deposited al-doped ZnO thin films for display applications",

abstract = "The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.",

keywords = "Al-doped ZnO, ALD technique, Flexible PDLC devices, LC display, Transparent conductive layers",

author = "Dimitre Dimitrov and Tsai, {Che Liang} and Stefan Petrov and Vera Marinova and Dimitrina Petrova and Blagovest Napoleonov and Blagoy Blagoev and Velichka Strijkova and Ken-Yuh Hsu and Shiuan-Huei Lin",

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doi = "10.3390/COATINGS10060539",

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T1 - Atomic layer-deposited al-doped ZnO thin films for display applications

AU - Dimitrov, Dimitre

AU - Tsai, Che Liang

AU - Petrov, Stefan

AU - Marinova, Vera

AU - Petrova, Dimitrina

AU - Napoleonov, Blagovest

AU - Blagoev, Blagoy

AU - Strijkova, Velichka

AU - Hsu, Ken-Yuh

AU - Lin, Shiuan-Huei

PY - 2020/6

Y1 - 2020/6

N2 - The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

AB - The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

KW - Al-doped ZnO

KW - ALD technique

KW - Flexible PDLC devices

KW - LC display

KW - Transparent conductive layers

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DO - 10.3390/COATINGS10060539

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SN - 2079-6412

VL - 10

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EP - 11

JO - Coatings

JF - Coatings

IS - 6

M1 - 539

ER -

Atomic layer-deposited al-doped ZnO thin films for display applications

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Keywords

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