Atomic layer-deposited al-doped ZnO thin films for display applications

Dimitre Dimitrov*, Che Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken-Yuh Hsu, Shiuan-Huei Lin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

Original languageEnglish
Article number539
Pages (from-to)1-11
Number of pages11
Issue number6
StatePublished - Jun 2020


  • Al-doped ZnO
  • ALD technique
  • Flexible PDLC devices
  • LC display
  • Transparent conductive layers


Dive into the research topics of 'Atomic layer-deposited al-doped ZnO thin films for display applications'. Together they form a unique fingerprint.

Cite this