Antimicrobial effects by silver–indium–tantalum oxide thin film in visible light

Chuan Li*, J. H. Hsieh, P. H. Hsueh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


This study focuses on the antimicrobial effects in silver-indium-tantalum oxide (Ag–InTaO) thin films. A stack of alternated layers of Ag (7 ​nm), In2O3 (14 ​nm) and Ta2O5 (10 ​nm) was sequentially deposited by sputtering. Then this as-deposited stack of films was rapidly annealed at three selected temperatures 700, 800 or 900 ​°C for 5 ​min to allow the formation of complex oxides. Results from material characterization indicate that annealing help to form complex oxides, intermetallic compounds and Ag particles on the top surface. These features lead to the improved antimicrobial effect against E. Coli. under visible light by Ag–InTaO.

Original languageEnglish
Article number100032
JournalMedicine in Novel Technology and Devices
StatePublished - Jun 2020


  • Ag–InTaO
  • Antimicrobial
  • Photo-catalysis
  • Rapid thermal annealing
  • UV–Vis–NIR spectrum


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