Angular-interrogation attenuated total reflection metrology system for plasmonic sensors

Jenq Nan Yih*, Fan Ching Chien, Chun Yun Lin, Hon Fai Yau, Shean Jen Chen

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

29 Scopus citations

Abstract

We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupledwaveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10-4 deg.

Original languageEnglish
Pages (from-to)6155-6162
Number of pages8
JournalApplied Optics
Volume44
Issue number29
DOIs
StatePublished - 10 Oct 2005

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