Analysis of an ONO gate film effect on n- and p-MOSFET mobilities

H. Iwai*, H. S. Momose, S. Takagi, T. Morimoto, S. Kitagawa, S. Kambayashi, K. Yamabe, S. Onga

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science