Abstract
A novel differential-phase optical coherence reflectometer (DPOCR) was proposed using a low-coherence source, integrating it with an analog differential-phase decoding method. In the experiment, the DP-OCR performed a localized surface profile measurement of an optical grating (1200 1p/mm) and demonstrated its ability to measure the translation speed of a tilted mirror. Experimentally, the resolution of the axial displacement of proposed DP-OCR at 185 pm was demonstrated.
Original language | English |
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Pages (from-to) | 12847-12858 |
Number of pages | 12 |
Journal | Optics Express |
Volume | 16 |
Issue number | 17 |
DOIs | |
State | Published - 18 Aug 2008 |