An interfacial investigation of high-dielectric constant material hafnium oxide on Si substrate

S. C. Chen*, J. C. Lou, Chao-Hsin Chien, Po-Tsun Liu, T. C. Chang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Fingerprint

Dive into the research topics of 'An interfacial investigation of high-dielectric constant material hafnium oxide on Si substrate'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds