An electro-thermally and laterally driven polysilicon microactuator

Keyphrases

• Polysilicon 100%
• Microactuators 100%
• Microstructure 50%
• Input Voltage 25%
• Design Parameters 25%
• Heat Dissipation 25%
• Thermal Expansion 25%
• Microgripper 25%
• Variable Cross-section 25%
• Operating Principle 25%
• Two-beam 25%
• Maximum Temperature 25%
• Gripping Force 25%

Engineering

• Polysilicon 100%
• Simulation Result 50%
• Input Voltage 50%
• Good Agreement 50%
• Cross Section 50%
• Design Parameter 50%
• Heat Losses 50%
• Microgripper 50%
• Maximum Temperature 50%

Material Science

• Thermal Expansion 100%