An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run

Kelvin Yih Yuh Doong; Sunnys Hsieh; S. C. Lin; L. J. Hung; Robin J. Wang; Binson Shen; J. W. Hisa; Jyh-Chyurn Guo; I. C. Chen; K. L. Young; Charles Ching Hsiang Hsu

doi:10.1109/ICMTS.2002.1193171

An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run

Kelvin Yih Yuh Doong^*, Sunnys Hsieh, S. C. Lin, L. J. Hung, Robin J. Wang, Binson Shen, J. W. Hisa, Jyh-Chyurn Guo, I. C. Chen, K. L. Young, Charles Ching Hsiang Hsu

^*Corresponding author for this work

Institute of Electronics

Research output: Contribution to conference › Paper › peer-review

3 Scopus citations

Abstract

A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

Original language	English
Pages	55-59
Number of pages	5
DOIs	https://doi.org/10.1109/ICMTS.2002.1193171
State	Published - 2002
Event	Proceedings of The 2002 International Conference on Microelectronic Test Structures - Cork, Ireland Duration: 8 Apr 2002 → 11 Apr 2002

Conference

Conference	Proceedings of The 2002 International Conference on Microelectronic Test Structures
Country/Territory	Ireland
City	Cork
Period	8/04/02 → 11/04/02

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10.1109/ICMTS.2002.1193171

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Doong, K. Y. Y., Hsieh, S., Lin, S. C., Hung, L. J., Wang, R. J., Shen, B., Hisa, J. W., Guo, J.-C., Chen, I. C., Young, K. L., & Hsu, C. C. H. (2002). An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run. 55-59. Paper presented at Proceedings of The 2002 International Conference on Microelectronic Test Structures, Cork, Ireland. https://doi.org/10.1109/ICMTS.2002.1193171

@conference{d83b1217f4b1465fb6b8a030ec5c970d,

title = "An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run",

abstract = "A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.",

author = "Doong, {Kelvin Yih Yuh} and Sunnys Hsieh and Lin, {S. C.} and Hung, {L. J.} and Wang, {Robin J.} and Binson Shen and Hisa, {J. W.} and Jyh-Chyurn Guo and Chen, {I. C.} and Young, {K. L.} and Hsu, {Charles Ching Hsiang}",

year = "2002",

doi = "10.1109/ICMTS.2002.1193171",

language = "English",

pages = "55--59",

note = "Proceedings of The 2002 International Conference on Microelectronic Test Structures ; Conference date: 08-04-2002 Through 11-04-2002",

}

Doong, KYY, Hsieh, S, Lin, SC, Hung, LJ, Wang, RJ, Shen, B, Hisa, JW, Guo, J-C, Chen, IC, Young, KL & Hsu, CCH 2002, 'An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run', Paper presented at Proceedings of The 2002 International Conference on Microelectronic Test Structures, Cork, Ireland, 8/04/02 - 11/04/02 pp. 55-59. https://doi.org/10.1109/ICMTS.2002.1193171

An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run. / Doong, Kelvin Yih Yuh; Hsieh, Sunnys; Lin, S. C. et al.
2002. 55-59 Paper presented at Proceedings of The 2002 International Conference on Microelectronic Test Structures, Cork, Ireland.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM)

T2 - Proceedings of The 2002 International Conference on Microelectronic Test Structures

AU - Doong, Kelvin Yih Yuh

AU - Hsieh, Sunnys

AU - Lin, S. C.

AU - Hung, L. J.

AU - Wang, Robin J.

AU - Shen, Binson

AU - Hisa, J. W.

AU - Guo, Jyh-Chyurn

AU - Chen, I. C.

AU - Young, K. L.

AU - Hsu, Charles Ching Hsiang

PY - 2002

Y1 - 2002

N2 - A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

AB - A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

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DO - 10.1109/ICMTS.2002.1193171

M3 - Paper

AN - SCOPUS:0038495581

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EP - 59

Y2 - 8 April 2002 through 11 April 2002

ER -

Doong KYY, Hsieh S, Lin SC, Hung LJ, Wang RJ, Shen B et al.. An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run. 2002. Paper presented at Proceedings of The 2002 International Conference on Microelectronic Test Structures, Cork, Ireland. doi: 10.1109/ICMTS.2002.1193171

An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run

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