Amorphous In 2 O 3 -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency

Chih Hsiang Chang; Chur Shyang Fuh; Chih Jui Chang; Che Chia Chang; Xiu Yun Yeh; Po-Tsun Liu; Hsin Hua Lin; Kuo Lung Fang; Yih Chyun Kao; Chih Lung Lee; Po Li Shih; Wei Chih Chang; I. Min Lu

Amorphous In ₂ O ₃ -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency

Chih Hsiang Chang, Chur Shyang Fuh, Chih Jui Chang, Che Chia Chang, Xiu Yun Yeh, Po-Tsun Liu, Hsin Hua Lin, Kuo Lung Fang, Yih Chyun Kao, Chih Lung Lee, Po Li Shih, Wei Chih Chang, I. Min Lu

Department of Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this work, the influence of annealing on In-W-O (a-IWO) TFTs was investigated. The 100°C-annealed a-IWO TFTs exhibited an optimized performance with mobility of 39.16 cm ² /Vs. Owing to the energy from annealing process, the structural relaxation can be enhanced leading to a better electrical characteristic of a-IWO TFTs.

Original language	English
Title of host publication	21st International Display Workshops 2014, IDW 2014
Publisher	Society for Information Display
Pages	221-224
Number of pages	4
ISBN (Electronic)	9781510827790
State	Published - 1 Jan 2014
Event	21st International Display Workshops 2014, IDW 2014 - Niigata, Japan Duration: 3 Dec 2014 → 5 Dec 2014

Publication series

Name	21st International Display Workshops 2014, IDW 2014
Volume	1

Conference

Conference	21st International Display Workshops 2014, IDW 2014
Country/Territory	Japan
City	Niigata
Period	3/12/14 → 5/12/14

Keywords

Low-thermal budget
Oxygen vacancies (V )
Transparent Amorphous Oxide Semiconductor (TAOS)

Cite this

Chang, C. H., Fuh, C. S., Chang, C. J., Chang, C. C., Yeh, X. Y., Liu, P-T., Lin, H. H., Fang, K. L., Kao, Y. C., Lee, C. L., Shih, P. L., Chang, W. C., & Lu, I. M. (2014). Amorphous In ₂ O ₃ -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency. In 21st International Display Workshops 2014, IDW 2014 (pp. 221-224). (21st International Display Workshops 2014, IDW 2014; Vol. 1). Society for Information Display.

@inproceedings{ffed93ac696945d996f56b6e81362056,

title = "Amorphous In 2 O 3 -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency",

abstract = " In this work, the influence of annealing on In-W-O (a-IWO) TFTs was investigated. The 100°C-annealed a-IWO TFTs exhibited an optimized performance with mobility of 39.16 cm 2 /Vs. Owing to the energy from annealing process, the structural relaxation can be enhanced leading to a better electrical characteristic of a-IWO TFTs. ",

keywords = "Low-thermal budget, Oxygen vacancies (V ), Transparent Amorphous Oxide Semiconductor (TAOS)",

author = "Chang, {Chih Hsiang} and Fuh, {Chur Shyang} and Chang, {Chih Jui} and Chang, {Che Chia} and Yeh, {Xiu Yun} and Po-Tsun Liu and Lin, {Hsin Hua} and Fang, {Kuo Lung} and Kao, {Yih Chyun} and Lee, {Chih Lung} and Shih, {Po Li} and Chang, {Wei Chih} and Lu, {I. Min}",

year = "2014",

month = jan,

day = "1",

language = "English",

series = "21st International Display Workshops 2014, IDW 2014",

publisher = "Society for Information Display",

pages = "221--224",

booktitle = "21st International Display Workshops 2014, IDW 2014",

address = "United States",

note = "21st International Display Workshops 2014, IDW 2014 ; Conference date: 03-12-2014 Through 05-12-2014",

}

Chang, CH, Fuh, CS, Chang, CJ, Chang, CC, Yeh, XY, Liu, P-T, Lin, HH, Fang, KL, Kao, YC, Lee, CL, Shih, PL, Chang, WC & Lu, IM 2014, Amorphous In ₂ O ₃ -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency. in 21st International Display Workshops 2014, IDW 2014. 21st International Display Workshops 2014, IDW 2014, vol. 1, Society for Information Display, pp. 221-224, 21st International Display Workshops 2014, IDW 2014, Niigata, Japan, 3/12/14.

Amorphous In ₂ O ₃ -Based thin film transistors fabricated by low-thermal budget process with high mobility and transparency. / Chang, Chih Hsiang; Fuh, Chur Shyang; Chang, Chih Jui et al.
21st International Display Workshops 2014, IDW 2014. Society for Information Display, 2014. p. 221-224 (21st International Display Workshops 2014, IDW 2014; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Yeh, Xiu Yun

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AU - Fang, Kuo Lung

AU - Kao, Yih Chyun

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