AlGaNGaN Schottky barrier diodes with multi-Mg_xN_yGaN buffer

AlGaNGaN Schottky barrier diodes (SBDs) with multi- Mgx Ny GaN buffer were fabricated and investigated. It was found that we can effectively suppress the formation of threading dislocation in the epitaxial layers and thus obtain better crystal quality using the multi- Mgx Ny GaN buffer. It was also found that we can achieve a larger effective Schottky barrier height and thus reduce leakage current of the SBDs by using the multi- Mgx Ny GaN buffer.