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Advancements in single-crystal silicon with elevated-laser-liquid-phase-epitaxy (ELLPE) for monolithic 3D ICs
Bo Jheng Shih*, Yu Ming Pan, Hao Tung Chung, Nein Chih Lin, Chih Chao Yang, Po Tsang Huang, Huang Chung Cheng, Chang Hong Shen, Jia Min Shieh, Wen Fa Wu, Kuan Neng Chen, Chenming Hu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review