@article{a2292ccd8bb7469c86e76fe734443773,
title = "Advanced nano-devices produced by high-performance plasma etching processes",
keywords = "High density plasma, Nanodevices, Neutral beam, Radiation damage, Super-fine etching technology, ULSI",
author = "Seiji Samukawa",
year = "2007",
doi = "10.2493/jjspe.73.993",
language = "English",
volume = "73",
pages = "993--998",
journal = "Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "9",
}