Advanced gate-all-around fin-like poly-si tfts with multiple nanowire channels

Shih Wei Tu*, Ta Chuan Liao, Wei Kai Lin, Cheng Chin Liu, Ya-Hsiang Tai, Huang-Chung Cheng, Feng Tso Chien, Chii Wen Chen, Wan Lu Chen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Chemical Engineering

Engineering

Material Science