Advanced 2.5D Heterogeneous Integrated Platform Using Flexible Biocompatible Substrate for Biomedical Sensing System

Shu Yun Ku, Tzu Chieh Chou, Yi Chieh Tsai, Tzu Chieh Chou, Han Wen Hu, Yu Ren Fang, Yu Ju Lin, Po-Tsang Huang, Jin-Chern Chiou, Kuan-Neng Chen*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, a novel biocompatible flexible heterogeneous integration platform has been developed. Using thermal compression bonding and conductive adhesive, three different functional devices, including sensing array, analog front-end chip, and LED array, are integrated on the flexible biocompatible substrate. Moreover, the whole exposed area of the platform is designed to be processed with biocompatible material. Thus, this structure is a promising integration scheme for the biomedical applications. Bending tests and reliability tests have been also performed to validate the feasibility of this flexible heterogeneous integration platform.

Original languageEnglish
Title of host publicationProceedings - IEEE 71st Electronic Components and Technology Conference, ECTC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1020-1025
Number of pages6
ISBN (Electronic)9780738145235
DOIs
StatePublished - 2021
Event71st IEEE Electronic Components and Technology Conference, ECTC 2021 - Virtual, Online, United States
Duration: 1 Jun 20214 Jul 2021

Publication series

NameProceedings - Electronic Components and Technology Conference
Volume2021-June
ISSN (Print)0569-5503

Conference

Conference71st IEEE Electronic Components and Technology Conference, ECTC 2021
Country/TerritoryUnited States
CityVirtual, Online
Period1/06/214/07/21

Keywords

  • Bendable interconnect
  • Biocompatible
  • Flexible device
  • Heterogeneous integration
  • SU-8

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