A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor

C. H. Cheng; C. C. Huang; H. H. Hsu; P. C. Chen; K. C. Chiang; Albert Chin; F. S. Yeh

doi:10.1149/1.3491490

A study on frequency-dependent voltage nonlinearity of SrTiO₃ rf capacitor

C. H. Cheng, C. C. Huang, H. H. Hsu, P. C. Chen, K. C. Chiang, Albert Chin, F. S. Yeh

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO₃/TaN and TaN/SrTiO ₃/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

Original language	English
Journal	Electrochemical and Solid-State Letters
Volume	13
Issue number	12
DOIs	https://doi.org/10.1149/1.3491490
State	Published - 29 Oct 2010

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@article{ac613c1d2ba9474a98a8647a62ff298e,

title = "A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor",

abstract = "In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.",

author = "Cheng, {C. H.} and Huang, {C. C.} and Hsu, {H. H.} and Chen, {P. C.} and Chiang, {K. C.} and Albert Chin and Yeh, {F. S.}",

year = "2010",

month = oct,

day = "29",

doi = "10.1149/1.3491490",

language = "English",

volume = "13",

journal = "Electrochemical and Solid-State Letters",

issn = "1099-0062",

publisher = "Electrochemical Society Inc.",

number = "12",

}

TY - JOUR

T1 - A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor

AU - Cheng, C. H.

AU - Huang, C. C.

AU - Hsu, H. H.

AU - Chen, P. C.

AU - Chiang, K. C.

AU - Chin, Albert

AU - Yeh, F. S.

PY - 2010/10/29

Y1 - 2010/10/29

N2 - In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

AB - In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

UR - http://www.scopus.com/inward/record.url?scp=77958505933&partnerID=8YFLogxK

U2 - 10.1149/1.3491490

DO - 10.1149/1.3491490

M3 - Article

AN - SCOPUS:77958505933

SN - 1099-0062

VL - 13

JO - Electrochemical and Solid-State Letters

JF - Electrochemical and Solid-State Letters

IS - 12

ER -

A study on frequency-dependent voltage nonlinearity of SrTiO₃ rf capacitor

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