A study on abrupt switching phenomena of independent double-gated poly-Si nanowire transistors under cryogenic operation

Zerming Lin*, Wei Chen Chen, Horng-Chih Lin, Tiao Yuan Huang

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    In this work, to study short-channel effects (SCEs) of our previously proposed nwfet [1] and probe its transport characteristics, we have fabricated devices with sub-100-nm channel length (l) and performed characterization at various temperatures (t). We found, for the first time, that the non-uniform dopant distribution in the gate leads to additional carrier conduction barriers, manifesting themselves in abrupt turn-on characteristics for t below 200 k with subthreshold swing (ss) smaller than what drift-diffusion theory dictates.

    Original languageEnglish
    Title of host publicationProceedings of 2011 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2011
    Pages38-39
    Number of pages2
    DOIs
    StatePublished - 11 Jul 2011
    Event2011 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2011 - Hsinchu, Taiwan
    Duration: 25 Apr 201127 Apr 2011

    Publication series

    NameInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings

    Conference

    Conference2011 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2011
    Country/TerritoryTaiwan
    CityHsinchu
    Period25/04/1127/04/11

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