A study of parasitic resistance effects in thin-channel polycrystalline silicon TFTs with tungsten-clad source/drain

Hsiao-Wen Zan*, Ting Chang Chang, Po Sheng Shih, Du Zen Peng, Po Yi Kuo, Tiao Yuan Huang, Chun Yen Chang, Po-Tsun Liu

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

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Engineering

Material Science