A Programmable CMOS DEP Chip for Cell Manipulation

This work presents a programmable CMOS DEP chip that allows real-time control over the spatial distribution of DEP force, enabling controlled cell movement on the chip surface, from single-cell manipulation to multi-cell patterning. Implemented on a standard 0.18 μm CMOS process without post-processing, the chip features a 128 × 128 array of individually controllable 10 μm microelectrodes with 0.28 μm spacing. Utilizing Metal 5 electrodes in a 1P6M process, the chip achieves particle manipulation speeds up to 27 μm/s while operating at only 1.8 V, preserving cell viability as confirmed through post- DEP assessments. The implementation of time-sharing patterns enhances manipulation precision by creating distinct boundaries between phases. Experiments demonstrate the chip's capabilities in particle patterning, concentration control, and single-particle manipulation, all performed sequentially on the same chip. Additionally, stem cell aggregation control demonstration offers possibilities for future differentiation studies. With its reconfigurability, this DEP chip offers promising solutions to technical challenges in cell preparation, drug screening, and other biological applications.